JPH0395630U - - Google Patents
Info
- Publication number
- JPH0395630U JPH0395630U JP91690U JP91690U JPH0395630U JP H0395630 U JPH0395630 U JP H0395630U JP 91690 U JP91690 U JP 91690U JP 91690 U JP91690 U JP 91690U JP H0395630 U JPH0395630 U JP H0395630U
- Authority
- JP
- Japan
- Prior art keywords
- discharge electrode
- bottom plate
- attached
- electrode according
- shapes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 239000000758 substrate Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990000916U JP2515719Y2 (ja) | 1990-01-11 | 1990-01-11 | 着脱式の放電電極 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990000916U JP2515719Y2 (ja) | 1990-01-11 | 1990-01-11 | 着脱式の放電電極 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0395630U true JPH0395630U (en]) | 1991-09-30 |
| JP2515719Y2 JP2515719Y2 (ja) | 1996-10-30 |
Family
ID=31504852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990000916U Expired - Lifetime JP2515719Y2 (ja) | 1990-01-11 | 1990-01-11 | 着脱式の放電電極 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2515719Y2 (en]) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59148348A (ja) * | 1983-02-15 | 1984-08-25 | Nec Corp | 半導体装置およびその製造方法 |
| JPH0199213A (ja) * | 1987-10-13 | 1989-04-18 | Mitsui Toatsu Chem Inc | 膜形成装置 |
| JPH01227426A (ja) * | 1988-03-08 | 1989-09-11 | Mitsui Toatsu Chem Inc | 成膜装置 |
-
1990
- 1990-01-11 JP JP1990000916U patent/JP2515719Y2/ja not_active Expired - Lifetime
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59148348A (ja) * | 1983-02-15 | 1984-08-25 | Nec Corp | 半導体装置およびその製造方法 |
| JPH0199213A (ja) * | 1987-10-13 | 1989-04-18 | Mitsui Toatsu Chem Inc | 膜形成装置 |
| JPH01227426A (ja) * | 1988-03-08 | 1989-09-11 | Mitsui Toatsu Chem Inc | 成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2515719Y2 (ja) | 1996-10-30 |